品牌: | ULVAC | 规格: | 个 |
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类型: | DC电源 | 型号: | DC-20-4-AM |
DC-10和DC-20是10kW及20kW输出功率的溅射用DC電源。它由可靠的部件和电路组成。
它是等离子体负载的可靠电源,其设计反映了包括电源应用在内的多年积累的专业知识。
特点
轻量?省空间
轻量?省空间的设计,安装简易
输出电压范围可选
除800V规格外,还提供1000V规格。
丰富的电弧处理
丰富的电弧控制系统。
不需要冷却水
强制空冷系统,不需要冷却水。
可以安装高速电弧中断回路
实现标准的低电弧能量。 此外,可以安装可选的高速电弧中断电路。
自由的并联操作功能
DC-10,DC-20:可选的并联运行功能允许自由组合10kW和20kW,并联运行多达12个单元。 (240千瓦)
用途
FPD用溅射设备
半导体用溅射设备
触摸屏用溅射设备用
工业涂层用溅射设备
规格
Model | DC-10-AM | DC-10-H-AM | DC-10-4-AM | DC-20-AM | DC-20-H-AM | DC-20-4-AM |
Input specification | Rated input voltage | 3-Phase 187 to 229VAC | 3-Phase AC342 to 440V | 3-Phase 187 to 229VAC | 3-Phase AC342 to 440V | |
Input capacity | 13.5kVA or less | 25kVA or less | ||||
Output specification | Maximum rated power | 10kW | 20kW | |||
Rated current | 2*** | 18A | 2*** | 50A | 40A | 50A |
Rated voltage | -800V | -1000V | -800V | -800V | -1000V | -800V |
Ignition voltage | -1500V | |||||
Abnormal discharge control | Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected | |||||
Control | Control method | Constant power control (P control)/constant current control (I control)/constant voltage control (V control) | ||||
Control precision | Constant power control (P Control):±0.5% or less of the rated output or ±1% of the set value, whichever is larger. Constant current control (I Control):±1% or less of the rated output or ±2% of the set value, whichever is larger. Constant voltage control (V Control):±1% or less of the rated output or ±2% of the set value, whichever is larger. | |||||
Control warranty scope | Constant power control, 10 to 100% of rated power value | |||||
Extenal interface | analog/digital,RS-232C or 485 | |||||
Parallel operation | Up to 12units can be controlled by master/slave communication | |||||
Cooling method | Forced air-cooling | |||||
Dimension W×D×H | 483×630×133mm (excluding protrusions) | |||||
Weight | 29kg | 36kg | ||||
Applicable standard | CE/ SEMI F47/ RoHS |
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联系人 | 周先生 |
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电话 | 15510102388 |